APL F-doped alumina manuscript

Chalker, Paul and Roberts, Joseph (2015) APL F-doped alumina manuscript. [Data Collection]

Collection description

Control of threshold voltage in E-mode and D-mode GaN-on-Si Metal-Insulator-Semiconductor heterostructure field effect transistors by in-situ fluorine doping of atomic layer deposition Al2O3 gate dielectrics

Keywords: ALD, Power electronics, GaN, MISFET
Divisions: Faculty of Science and Engineering > School of Engineering
Depositing User: Paul Chalker
Date Deposited: 22 Feb 2016 09:21
Last Modified: 22 Feb 2016 09:21
URI: http://datacat.liverpool.ac.uk/id/eprint/60

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