Mitrovic, Ivona Z (2017) Barrier tuning of atomic layer deposited Ta2O5 and Al2O3 in double dielectric diodes, Journal of Vacuum Science and Technology B, 35(1) 01A117 (2017). [Data Collection]
Data Catalogue DOI: 10.17638/datacat.liverpool.ac.uk/268
Description
The data set relates to the article with DOI: 10.1116/1.4974219.
Keywords: | Ta2O5, Al2O3, metal insulator metal didoes |
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Divisions: | Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science |
Depositing User: | Ivona Mitrovic |
Date Deposited: | 16 Mar 2017 10:24 |
Last Modified: | 16 Mar 2017 10:25 |
DOI: | 10.17638/datacat.liverpool.ac.uk/268 |
URI: | https://datacat.liverpool.ac.uk/id/eprint/268 |
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